USPTO Patents Application 10507321

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PATENT ABSTRACTS OF JAPAN

(1 1 publication number : 53-1 41 573

(43)Date of publication of application : 09.12.1978

(51)Int.CI.

H01L 21/302

(21 Application number
(22)Date of filing:

: 52-056225
16.05.1977

(71) Applicant :

(72) Inventor :

TOSHIBA CORP
OZAWA SHIGERU

(54) PELLET DIVIDING METHOD OF SEMICONDUCTOR WAFER

(57)Abstract:

PURPOSE: To separate a substrate into pellets easily, by placing the substrate loosely inserted info
the hole of a non-elastic body onto a rubber plate and by separating the substrate at a scribe line
under constant pressure by pressing it down by a roller.

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